@book{Knehr2023, abstract = {This work presents three advances to scale SNSPDs from few-pixel devices to large detector arrays: atomic layer deposition for the fabrication of uniform superconducting niobium nitride films of few-nanometer thickness, a frequency-multiplexing scheme to operate multiple detectors with a reduced number of lines, and the integration of SNSPDs with free-form polymer structures to achieve efficient optical coupling onto the active area of the detectors.Umfang: VII, 176 S.Preis: 54.00 €}, address = {Karlsruhe}, author = {Knehr, Emanuel}, doi = {10.5445/KSP/1000152607}, isbn = {978-3-7315-1256-1}, keyword = {SNSPD, Einzelphotonendetektor, Supraleitung, Atomlagenabscheidung, single-photon detector, superconductivity, thin-film technology, frequency-division multiplexing, optical integration}, month = {Mar}, pages = {202}, publisher = {KIT Scientific Publishing}, title = {Technology and readout for scaling up superconducting nanowire single-photon detectors}, year = {2023} }