Kapitel/Beitrag aus dem Buch: Längle, T et al. 2015. OCM 2015 – 2nd International Conference on Optical Characterization of Materials, March 18th – 19th, 2015, Karlsruhe, Germany : Conference Proceedings.
We present a microoptical sensor solution for measuring
thicknesses and refractive indices of thin layers by measuring
changes in polarization of two laser beams under inclined angle
of incidence. The compact architecture does not require any
moving or rotating components and allows for low-maintenance
and robust operation. The measured polarized reflection is modelled
by Transfer Matrix method and Levenberg-Marquard fit algorithms
in order to obtain the target sample characteristics. Single
layer samples of SiO2, SiOxNy and SiNx on Silicon substrate
were analyzed. For several different single layer systems the deviations
of layer thicknesses and refractive indices are below 3%
as compared to independent reference measurements.
Schädel, M et al. 2015. Micro sensor for determination of thin layerthickness and refractive index. In: Längle, T et al (eds.), OCM 2015 – 2nd International Conference on Optical Characterization of Materials, March 18th – 19th, 2015, Karlsruhe, Germany : Conference Proceedings. Karlsruhe: KIT Scientific Publishing. DOI: https://doi.org/10.58895/ksp/1000044906-20
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Veröffentlicht am 18. März 2015