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  • Improvement of Roughness Measurement inSub-micron Ranges Using Contrast-basedDepolarization Field Components

    Franziska Pöller, Felis Salazar Bloise, Martin Jakobi, Jie Dong, Alexander Koch

    Kapitel/Beitrag aus dem Buch: Beyerer J. & Längle T. 2021. OCM 2021 – 5th International Conference on Optical Characterization of Materials, March 17th – 18th, 2021, Karlsruhe, Germany : Conference Proceedings.

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    The characterization of a surface, especially the roughness,
    is of great importance for industrial applications. There
    are already various optical methods for roughness measurement,
    which usually do not consider the depolarization effects of the
    scattered beam caused by the sample. This work aims out improving
    the roughness measurement method described in [1] by
    taking into account depolarization effects, due to the rough sample.
    For validation, other instruments are employed to compare
    the results in the measurement interval for which this technique
    is applied.

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    Empfohlene Zitierweise für das Kapitel/den Beitrag
    Pöller, F et al. 2021. Improvement of Roughness Measurement inSub-micron Ranges Using Contrast-basedDepolarization Field Components. In: Beyerer J. & Längle T (eds.), OCM 2021 – 5th International Conference on Optical Characterization of Materials, March 17th – 18th, 2021, Karlsruhe, Germany : Conference Proceedings. Karlsruhe: KIT Scientific Publishing. DOI: https://doi.org/10.58895/ksp/1000128686-16
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    Veröffentlicht am 17. März 2021

    DOI
    https://doi.org/10.58895/ksp/1000128686-16