Improvement of Roughness Measurement inSub-micron Ranges Using Contrast-basedDepolarization Field Components
Franziska Pöller, Felis Salazar Bloise, Martin Jakobi, Jie Dong, Alexander Koch
Kapitel/Beitrag aus dem Buch: Beyerer J. & Längle T. 2021. OCM 2021 – 5th International Conference on Optical Characterization of Materials, March 17th – 18th, 2021, Karlsruhe, Germany : Conference Proceedings.