MEMS based systems and their applications inNIR spectroscopy for materials analysis

Spectrometers and spectrographs based on scanning
grating monochromators are well-established tools for various
applications, for example analysis of organic matter. As new applications
came into focus in the last few years, there is a demand
for more miniaturized systems. The future spectroscopic
devices should exhibit very small dimensions and low power
consumption. A spectroscopic system with a volume of only
(15 × 10 × 14) mm3 and a few milliwatts of power consumption,
that has the potential to fulfill the demands of the upcoming mobile
applications, has been developed. The approach is based on
two major improvements. First, resonantly driven MEMS (micro
electro mechanical systems) scanning grating chip, which provides
also two integrated optical, slits and piezoresistive position
detection has been used. Second, hybrid integration of optical
components by highly sophisticated manufacturing technologies
was applied. One objective is the combination of MEMS technology
and a planar mounting approach, which potentially facilitate
the mass production of spectroscopic systems and a significant
reduction of cost per unit. The optical system design as well as
the realization of a miniaturized scanning grating spectrometer
for the near infrared (NIR) range between 950 nm and 1900 nm
with a spectral resolution of 10 nm is presented. The MEMS devices
as well as the optical components have been manufactured
and first samples of the spectroscopic measurement device have
been mounted by an automated die bonder. First application
close measurements on organic matter have been performed and
will be discussed.